It is characterized by resistance to acid, alkali and various organic solvents, and is almost insoluble in all solvents. At the same time, Teflon is characterized by high temperature resistance, corrosion resistance, strong moisture resistance, chemical inertness and excellent insulation stability and low friction, with other coatings can not compete with the comprehensive advantages.
• High-Temperature Processes: Metal cassettes, especially those made from specialized aluminum alloys, are essential for applications involving high temperatures, such as thermal baking of wafers for extended periods, which can last for days.
• Thick and Bonded Wafer Handling: Standard plastic cassettes cannot accommodate thick or bonded wafers due to their limited slot dimensions. Metal cassettes are designed to handle these wafer types reliably without deformation.
• Automated Material Handling Systems (AMHS): Metal cassettes are integral to AMHS in modern semiconductor fabs, which demand precision, durability, and compatibility with automated transfer systems to maintain a clean and efficient process flow.
• Specialized Process Environments: Beyond general use, metal cassettes offer advantages in thermal and vacuum environments due to their dimensional stability and resistance to extreme conditions that could compromise other materials.
| BASIC INFORMATION | ||
|---|---|---|
| Part Number | Wafer Size | Slot |
| DSF21L08-000-R0 | 8"/200mm | 7 |
| Metarial | Surface Treatment | Size: L x W x H (Handle not included) |
| AL6061 | Teflon Coating (Lower plate in the slot) | 266 x 227 x 255mm |
| Slot Width | Slot Pitch | Slot Depth |
| 3.5mm | 10mm | 18.5mm |
* For more sizes or customization needs, please contact our team. We offer one-stop packaging solutions for your products.
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