Suitable for use with industry-standard sized expander/hoop rings, processed with AL 6061, anode oxidation for surface, nice appearance and useful.
• Wafer Storage and Transportation: Expander rings or hoop ring cassettes securely store and transport wafers, preventing damage from the external environment.
• Cleaning and Wet Processing: Metal cassettes made from corrosion-resistant materials are suitable for cleaning and other wet processing applications.
• High-Temperature Processes: Metal cassettes are used in thermal processes like Chemical Vapor Deposition (CVD) and Rapid Thermal Processing (RTP), where plastic cassettes would deform or melt.
| BASIC INFORMATION | ||
|---|---|---|
| Part Number | Wafer Size | Slot |
| DSF20G06-000-R5 | 6"/150mm | 5 |
| Metarial | Surface Treatment | Size: L x W x H |
| AL6061 | Anode Oxidation | 161.8x151x140mm |
| Expander Ring Outer Size | Slot Width | Slot Distance |
| Φ152mm | 8mm | 20mm |
| OTHER SPECIFICATIONS | |||||
|---|---|---|---|---|---|
| Cassette Size | Part Number | Expander Ring Outer Size | Slot Width | Slot Distance | Size: L x W x H |
| 5 slots-6" | DSF23A06 | Φ152mm | 9 | 20 | 221 x 162 x 140mm |
| 5 slots-7" | DSF23A07 | Φ186mm | 9 | 15 | 192 x 196 x 186mm |
| 5 slots-8" | DSF23A08 | Φ257mm | 9 | 24 | 264 x 276 x 296mm |
| 5 slots-10" | DSF23A10 | Φ300mm | 3.5 | 10 | 313 x 313 x 160mm |
* For more sizes or customization needs, please contact our team. We offer one-stop packaging solutions for your products.
Address
Building A11, Zone D, West Industrial Zone, Minzhu Community, Shajing Street, Baoan District, Shenzhen City, GD Province CN
Tel
+86 755 2322 9236
