Metal Wafer Cassette

- Made of high-quality aluminum alloy
- Hard oxidized surface, smooth and burr-free groove surface, no material jamming
- High temperature resistance 200~400°C without deformation
- Directly corresponds to the standard plastic transfer wafer cassette
- Standard size: 4, 6, 8, 12 inches

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Description

This metal wafer cassette is CNC precision machined from 7075 aluminum profiles and designed by more than ten years of industry experts, high temperature resistance of 200°C~400°C, high temperature baking without deformation, hard oxidation treatment for surface, directly correspond to the standard plastic cassette to pour.

Reference Materials

Hiner-pack® Metal Wafer Cassette Catalog.pdf

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Application

Used for semiconductor wafer silicon slice or glass slice baking and equipment experiment

Specifications

BASIC INFORMATION
Part Number	Wafer Size	Slot
DSF20Y08-000-R2	8"/200mm	25
Metarial	Surface Treatment	Size: L x W x H
AL7075	Hard Oxidation	221x218x219.3mm
Slot Width	Slot Pitch	Slot Depth
2mm	10mm	10mm