4-inch Teflon Wafer Cassette - PFA

Designed for Wafer Handling in Corrosive or High-Temperature Semiconductor Processes

Engineered for extreme semiconductor manufacturing conditions, PFA wafer cassettes excel in wafer transfer, storage, and wet process cleaning. Constructed from premium perfluoroalkoxy (PFA) or Teflon resin, they offer exceptional resistance to strong acids, hydrofluoric acid, and caustic chemicals, maintaining structural integrity at continuous operating temperatures up to 220 °C. The cassette’s smooth, translucent finish minimizes particle release, simplifies cleaning, and ensures wafer protection throughout processing. Designed to integrate with wafer etchers, wet benches, and SMIF/FOUP-compatible tools, these corrosion-resistant wafer carriers provide reliable, contamination-free handling for high-purity wafer cleaning, etching, and thermal applications in leading semiconductor fabs.