Designed for Wafer Handling in Corrosive or High-Temperature Semiconductor Processes
Engineered for extreme semiconductor manufacturing conditions, PFA wafer cassettes excel in wafer transfer, storage, and wet process cleaning. Constructed from premium perfluoroalkoxy (PFA) or Teflon resin, they offer exceptional resistance to strong acids, hydrofluoric acid, and caustic chemicals, maintaining structural integrity at continuous operating temperatures up to 220 °C. The cassette’s smooth, translucent finish minimizes particle release, simplifies cleaning, and ensures wafer protection throughout processing. Designed to integrate with wafer etchers, wet benches, and SMIF/FOUP-compatible tools, these corrosion-resistant wafer carriers provide reliable, contamination-free handling for high-purity wafer cleaning, etching, and thermal applications in leading semiconductor fabs.
• Handling wafers in high-temperature or corrosive wet processes
• Use in chemical baths for wafer cleaning or etching
• Storage of wafers in environments requiring chemical resistance
• Long-term use in fabs due to superior durability and purity
| BASIC INFORMATION | ||
|---|---|---|
| Part Number | Collocation Reference | Wafer Size |
| MCS-4/25-NP-PFA | -- | 4"/100 mm |
| Metarial | Maximum Capacity | Color |
| PFA | 25 | Transparent |
| Delivery Time | Usually 2-3 weeks, depending on order quantity |
* For more sizes or customization needs, please contact our team. We offer one-stop packaging solutions for your products.
| TECHNICAL DATA | ||
|---|---|---|
| PROPERTY | TEST METHOD | RATED VALUES |
| Specific Gravity | ASTM D-792 | 2.12~2.17 |
| Water Absorption | ASTM D-570 (24h, 1/3" thick) | <0.01% |
| Molding Shrinkage | -- | 0.04 cm/cm |
| Contact Angle | Angle with Horizontal Surface | 115° |
| Thermal Conductivity | ASTM C-177 | -- |
| Coefficient of Linear Thermal Expansion | ASTM D-696 (23~60°C) | 12x10-5 /°C |
| Melting Point | -- | 302~310 °C |
| Melt Viscosity | -- | 104~105 /°C (380°C) |
| Maximum Continuous Use Temperature | -- | 380°C |
| Tensile Strength | ASTM D-638 (23°C) | 27~31 MPa |
| Elongation | ASTM D-638 (23°C) | 280~300 % |
| Compressive Strength | ASTM D-695 (1%deformation, 25°C) | 5~6 MPa |
| Tensile Resilience | ASTM D-638 (23°C) | -- |
| Flexural Resilience | ASTM D-790 (23°C) | 647~686 MPa |
| Impact Strength | ASTM D-256 (23°C, Izod) | -- |
| Hardness | Durometer | D60 shore |
| Bearing Deformation | ASTM D-621 (100°C, 7MPa, 24h) ASTM D-621 (23°C, 14MPa, 24h) | 2.4 % 2.7 % |
| Static Friction Coefficient | Against Steel | 0.05 |
* The above data are typical laboratory values and are only used as a reference, not as a guarantee for quality indicators or any other use.
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