6-inch Teflon Wafer Cassette - PFA

PFA Wafer Cassettes for High-Purity Semiconductor Wet Processes

PFA wafer cassettes provide unmatched performance in the transfer, storage, and cleaning of semiconductor wafers during high-temperature wet processing and corrosive chemical applications. Molded from high-purity perfluoroalkoxy (PFA) or Teflon resin, these wafer carriers withstand prolonged exposure to strong acids, hydrofluoric acid, and alkaline solutions at temperatures up to 220 °C without warping or contamination. The smooth, translucent surfaces reduce particle generation and enable easy cleaning, safeguarding wafer quality during critical process steps. Compatible with standard wafer handling systems, wet benches, and SMIF/FOUP interfaces, PFA cassettes deliver outstanding chemical resistance, dimensional stability, and ultra-clean performance for advanced wafer etching, cleaning, and processing environments.